[16p-512-1~10] 薄膜・多層膜の界面イメージング

▼ [16p-512-4] Interface imaging of elements in atomic scale
- Application of projection-type X-ray fluorescence imaging -

〇(M2)Zhao Wenyang^1,2、桜井 健次^2,1 (1.筑波大学、2.物質材料研究機構)

キーワード：Interface, X-ray fluorescence imaging, X-ray standing wave

Detecting the elements at multilayer interfaces is currently an area of strong interest because many functions of multilayer systems are determined by the elements doped at interfaces. Frequently the elements are inhomogeneously doped. Therefore, imaging the interface elements and determining the corresponding depth position are both necessary to fully characterize the interface properties. The existing X-ray standing wave technique can detect the depth position of interface elements. However, it cannot reveal the inhomogeneous element distribution at the interface. In this research, we are able to simultaneously image the element distribution at interfaces and know the corresponding depth position in atomic scale by combining X-ray standing wave technique with projection-type X-ray fluorescence imaging technique.