[16p-E204-1~8] 2.2 Detection systems

[16p-E204-3] Fabrication and evaluation of vertical type BGaN radiation detector

〇Ken Mochizuki¹, Takumi Nakamura¹, Takuya Arikawa¹, Sigeyosi Usami², Maki Kushimoto², Yoshio Honda^2,3, Hiroshi Amano^2,3,4, Kazunobu Kojima⁵, Sigehusa Chichibu^3,5, Hidenori Mimura⁶, Yoku Inoue¹, Toru Aoki⁶, Takayuki Nakano¹ (1.Shizuoka Univ., 2.Nagoya Univ., 3.IMaSS-Nagoya Univ., 4.Akasaki Research Center, 5.IMRAM, Tohoku Univ., 6.R.I.R. Shizuoka Univ.)

Keywords:semiconductor detector, BGaN