The 64th JSAP Spring Meeting, 2017

Presentation information

Print

Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[16p-E206-1~17] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Thu. Mar 16, 2017 1:45 PM - 6:30 PM E206 (E206)

Koichiro Saga(Sony), Nobuya Mori(Osaka Univ.), Takashi Hasunuma(Univ. of Tsukuba)

4:15 PM - 4:30 PM

△ [16p-E206-10] Evaluation of Anisotropic Biaxial Stress in Trench Structure by Raman Spectroscopy

〇Takahiro Suzuki1, Ryo Yokogawa1, Kohei Oasa2, Tatsuya Nishiwaki2, Takeshi Hamamoto2, Atsushi Ogura1 (1.Meiji Univ., 2.Toshiba Corp.)

Keywords:trench, raman