[16p-P14-1~10] 3.14 Optical control devices and optical fibers

[16p-P14-1] Consideration on MEMS Optical Phase Modulating Device

〇Toshiyuki Kaeriyama

Keywords:Optical phase modulating device, Micromirror, Optical phase digital modulation

In the method modulating optical phase by controlling the position of light reflector surface, a micromechanical device of micron size structure has ability to set the position of light reflection surface with accuracy sufficiently shorter than a wave length. Considering optical phase modulating device that regulates a position of micromirror light reflector and reflects laser light on a surface of the light reflector with setting an optical path length of the light, so that an optical phase of the light is modulated. The micromirror light reflector takes stable state at either position of move up or move down, and transits between the states, from move up state to move down state, and vice versa, and the position in height of the reflector is regulated over a range of about 0.1um, enabling an optical phase digital modulation.