[16p-P3-1~23] 6.2 Carbon-based thin films

[16p-P3-1] Effects of Annealing Temperature on Structural and Optical Properties of CN Thin Films

〇Akito Nonomura¹, Masaki Satake², Shigeyuki Nakamura³, Kenichi Takarabe⁴, Kazutoshi Fukui⁵, Junji Sawahata⁶, Kunio Itoh¹, Takahiko Ban¹, Shin-ichi Yamamoto¹ (1.Ryukoku Univ., 2.Akashi Nat. College of Tech., 3.Tsuyama Nat. College of Tech., 4.Okayama Univ. of Sci., 5.Fukui Univ., 6.Ibaraki Nat. College of Tech.)

Keywords:carbon nitride