[16p-P3-1~23] 6.2 Carbon-based thin films

[16p-P3-2] Characterization of carbon nitride film using MgO powders

〇Shingo Yoshioka¹, Akito Nonomura¹, Yuya Isokawa¹, Masaki Satake², Shigeyuki Nakamura³, Kenichi Takarabe⁴, Kazutoshi Fukui⁵, Junzi Sawahata⁶, Kunio Ito¹, Takahiko Ban¹, Shinichi Yamamoto¹ (1.Ryukoku Univ., 2.Akashi Nat. College of Tech., 3.Tsuyama Nat. College of Tech., 4.Okayama Univ. of Sci., 5.Fukui Univ., 6.Ibaraki Nat. College of Tech.)

Keywords:amorphous carbon nitride