[16p-P3-1~23] 6.2 Carbon-based thin films

[16p-P3-11] Enhancement of diamond nucleation on SiO2/Si substrates with a-Si thin film

〇Tomohiro Shinagawa¹, Koji Yoshitsugu¹, Keisuke Nakamura¹, Kunihiko Nishimura¹, Eiji Yagyu¹, Hideaki Yamada², Mikio Yamamuka¹ (1.MitsubishiElectric Co., 2.AIST)

Keywords:diamond, amorphous silicon