[16p-P3-1~23] 6.2 Carbon-based thin films

[16p-P3-10] Fabrication of High Efficiency Wide Bandgap Silicon-added Amorphous Carbon Based Solar Cells and Investigation of Output Characteristic of Solar Cell Correlates Chemical Bonding Condition

〇Yuta Shimizu¹, Hiroshi Naragino¹, Kensuke Honda¹ (1.Yamaguchi Univ.)

Keywords:Amorphous carbon, Soar cell, Chemical bonding structure

Si-added amorphous carbon (a-C) semiconductor thin films were deposited by radio frequency plasma chemical vapour deposition for multi-junction solar cells with high-efficiency.