[16p-P3-1~23] 6.2 Carbon-based thin films

[16p-P3-5] Variation in film properties of fluorine containing DLC film by exposure to soft X-rays

Hiroki Takamatsu¹, 〇Kazuhiro Kanda¹, Eri Miura², Hiroki Akasaka³, Akihiro Saiga⁴, Koji Tamada⁴, Masahito Tagawa⁵, Kumiko Yokota⁵, Yuichi Furuyama⁶ (1.LASTI, Univ. Hyogo, 2.School of Eng., Univ. Hyogo, 3.School of Eng., Tokyo Inst. Tech., 4.Tokyo National College Tech., 5.School of Eng., Kobe Univ., 6.School of Maritime Sci., Kobe Univ.)

Keywords:Diamond-like carbon film, Fluorine containing DLC film, Irradiation of soft X-rays

We investigated the soft X-rays effect of fluorine containing DLC film by the exposure to soft X-rays less than 1000 eV. SR dose dependence in depth profile of elementary composition was obtained by measuring XPS during sputtering. From result of this measurement, fluorine atoms were found to be desorbed from F-DLC film, and the decrease of fluorine atom was observed in not only surface but also the film inside. In addition, film hardness increased with decreasing of fluorine content. As a result, influence of the soft X-radiation amounted to the film inside as well as a surface neighborhood.