[16p-P3-1~23] 6.2 Carbon-based thin films

[16p-P3-7] Fabrication of a-SiC_x:H thin films from the plasma decomposition of Si(CH₃)₄ - discussion on the surface O atoms and the film thickness

〇Haruhiko Ito¹ (1.Nagaoka Univ. Tech.)

Keywords:amorphous silicon carbide