[16p-P3-1~23] 6.2 Carbon-based thin films

[16p-P3-8] Relationship between gas-sorption properties and surface characteristics of carbonaceous film prepared by radio-frequency sputtering of the Japanese calligraphy ink disk

〇Yoriko Suda¹, Kento Ozaki¹, Toshiyuki Miyahara¹, Iwao Sugimoto¹, Hiroshi Muramatsu¹, Kazuhiko Takahashi² (1.Tokyo Univ. of Tech., 2.Doshisha Univ.)

Keywords:carbonaceous film, QCR, SPM