[16p-P8-1~23] 21.1 Joint Session K

[16p-P8-7] Study on the decrease in the residual donor density of PLD deposited Mn doped ZnO films

〇Ryosuke Kanaya¹, Kenshi Takada¹, Daisuke Kiriya¹, Takeshi Yoshimura¹, Atsushi Ashida¹, Norifumi Fujimura¹ (1.Osaka Prefecture Univ.)

Keywords:ZnO, ZnO:Mn, PLD