[17a-315-1~15] 8.3 Plasma deposition of thin film and surface treatment

△ [17a-315-1] Effect of sheath on the nanodiamond synthesis on Si surfaces using the dc methane/hydrogen plasma

〇Tomoki Kobayashi¹, Kazuki Uchida¹, Yuto Nawata², Masamichi Naitoh¹, Tomonori Ikari³, Tatsuzo Nagai⁴, Fumiya Shoji⁴ (1.Grad. School of Life Sci. & Sys. Eng., Kyushu Inst.Tech., 2.Kyushu Inst.Tech., 3.National Inst. of Tech., Ube College, 4.KKU Res. Institute)

Keywords:nanodiamond, sheath

We have reported that diamonds are formed on high temperature Si(100) substrates, using the low pressure columnar methane/hydrogen plasma. In this study, focusing on the plasma sheath formed above the substrate surface, we investigate the synthesis of ca. 20nm diamonds and the nanodiamond films on high temperature Si(100) surfaces.