The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[17a-418-1~10] 3.8 Optical measurement, instrumentation, and sensor

Fri. Mar 17, 2017 9:00 AM - 11:45 AM 418 (418)

Ryuji Morita(Hokkaido Univ.), Shinichi Watanabe(Keio Univ.)

9:15 AM - 9:30 AM

[17a-418-2] Error analysis of polarization components for imaging ellipsometry

Lianhua Jin1, Makoto Uehara2 (1.Univ. of Yamanashi, 2.Mejiro 67)

Keywords:imaging ellipsometry