[17a-418-1~10] 3.8 光計測技術・機器

▲ [17a-418-8] Precise profilometry for scattered media and tomography for multiple-layers samples using the Discrete frequency scanning laser

〇(D)Truong Tuan Cong¹、Banh Tuan Quoc^1,2、Shioda Tatsutoshi¹ (1.Saitama University、2.Sevensix Inc.)

キーワード：discrete frequency scanning laser, tomography

We propose the novel discrete frequency scanning laser of 200 GHz scanning step for industrial profilometry and tomography. The laser ring cavity of the proposed light source consists of a lasing medium, a frequency tuning part, and the Fabry-Perot etalon as a frequency comb generator. The proposed light source is used in the precise profilometry and tomography for the scattered media and multiple-layers samples, respectively.