[17a-503-1~13] 15.4 III-V-group nitride crystals

[17a-503-4] Wafer bonding technology for AlN-based nitride semiconductors

〇Kazuya Takahashi¹, Ryoji Shinoda¹, Motoaki Iwaya¹, Tetsuya Takeuchi¹, Satoshi Kamiyama¹, Tomokazu Hattori¹, Isamu Akasaki^1,2, Ryuji Katayama³, Masahiro Uemukai³ (1.Meijo Univ., 2.Nagoya Univ., 3.Osaka Univ.)

Keywords:semiconductor, AlN, bonding