[17a-503-1~13] 15.4 III-V-group nitride crystals

[17a-503-5] Annealing of sputtering AlN film and homoepitaxy on the AlN by HVPE

〇Yikang Liu¹, Hideto Miyake^1,2, Kazumasa Hiramatsu¹, Motoaki Iwaya³, Isamu Akazaki³ (1.Mie Univ., 2.Reg. Inn.,Mie Univ., 3.Meijo Univ.)

Keywords:AlN Annealing Homoepitaxy