[17a-P4-1~39] 12.3 Functional Materials and Novel Devices

[17a-P4-25] Fabrication of Polymer Cantilevers by a Printing-based Method and its Sensor Application

〇Shusuke Kanazawa¹, Yasuyuki Kusaka¹, Noritaka Yamamoto¹, Hirobumi Ushijima¹ (1.AIST FLEC)

Keywords:sensor, polymer, cantilever

Consumption of sensor devices have been kept increasing toward the trillion sensors universe. For the predicted future, it is required to not only high performance of the sensors, but also their eco-friendly manufacturing for social sustainability. From this point of view, we have developed a novel process which is based on printing and can fabricate polymer cantilever in shorter steps without use of the sacrificial layers. Operation of sensors which were obtained from the fabricated cantilever will be also reported in the presentation.