The 64th JSAP Spring Meeting, 2017

Presentation information

Print

Oral presentation

16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[17p-211-1~12] 16.3 Bulk, thin-film and other silicon-based solar cells

Fri. Mar 17, 2017 1:30 PM - 4:45 PM 211 (211)

Nobuyuki Matsuki(Kanagawa Univ.), Shinsuke Miyajima(Tokyo Institute of Technology)

2:00 PM - 2:15 PM

[17p-211-3] Depth Profiles of P and H atom at a-Si/c-Si Interface by Plasma Ion Implantation

〇Koichi Koyama1, Noboru Yamaguchi2, Miwa Tanaka2, Hideo Suzuki2, Keisuke Ohdaira1, Hideki Matsumura1 (1.JAIST, 2.ULVAC)

Keywords:Cat-CVD, Ion implantation, Heterojunction solar cell