The 64th JSAP Spring Meeting, 2017

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Oral presentation

CS Code-sharing session » CS.2 6.1/13.3/13.5 Code-sharing Session

[17p-304-1~15] CS.2 6.1/13.3/13.5 Code-sharing Session

Fri. Mar 17, 2017 1:00 PM - 5:00 PM 304 (304)

Masumi Saitoh(TOSHIBA), Hironori Fujisawa(Univ. of Hyogo)

3:30 PM - 3:45 PM

△ [17p-304-10] Importance of thermal history on ferroelectric phase formation in HfO2 film

〇Shigehisa Shibayama1, Lun Xu1, Xuan Tian1, Shinji Migita2, Akira Toriumi1 (1.The Univ. of Tokyo, 2.AIST)

Keywords:HfO2, Ferroelectric