The 64th JSAP Spring Meeting, 2017

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CS Code-sharing session » CS.2 6.1/13.3/13.5 Code-sharing Session

[17p-304-1~15] CS.2 6.1/13.3/13.5 Code-sharing Session

Fri. Mar 17, 2017 1:00 PM - 5:00 PM 304 (304)

Masumi Saitoh(TOSHIBA), Hironori Fujisawa(Univ. of Hyogo)

1:45 PM - 2:00 PM

[17p-304-4] Structural analysis of HfO2 epitaxial thin films on (001)Si substrate

〇Kenshi Takada1, Daisuke Kiriya1, Takeshi Yoshimura1, Norifumi Fujimura1 (1.Osaka Pref Univ.Eng.)

Keywords:HfO2