[17p-501-1~7] 10.1 Emerging materials in spintronics and magnetics (including fabrication and charactrization methodologies)

[17p-501-6] Upgrading Pulsed Laser Deposition System and Surface Morphology of Metal Film

〇(B)Yuta Suzuki¹, Masato Kotsugi¹ (1.Tokyo Univ. of Sci.)

Keywords:Pulsed Laser Deposition, Magnetic Thin Film, Superlattice

We performed systematic control of Pulsed Laser Deposition(PLD) and characterized surface morphology of deposited metal films. We controlled laser power, target position and shutter position automatically. Resulting stability of depositon rate was ±1%, and surface roughness was about 1nm. We successfully demonstrated that smooth surface could be fabricated by upgraded PLD system.