[17p-P2-1~13] 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

[17p-P2-2] Evaluation of Ga Pre-supply GaAs on Si (113) Grown by Molecular Beam Epitaxy

〇(M1)Tetsu Okuya¹, Masaya Yuki¹, Tetsuo Ikari¹, Atsuhiko Fukuyama¹, Hidetoshi Suzuki¹ (1.Miyazaki Univ.)

Keywords:MBE