[17p-P2-1~13] 15.3 III-V-group epitaxial crystals, Fundamentals of epitaxy

[17p-P2-3] N incorporation mechanism on GaPN alloy grown by surface nitridation methods

〇Takashi Kittaka¹, Keisuke Yamane¹, Kerlee Boualiong¹, Hiroto Sekiguchi¹, Hiroshi Okada^2,1, Akihiro Wakahara¹ (1.Toyohashi Tech., 2.Toyohashi EIIRIS)

Keywords:surface nitridation methods, MOVPE