1:30 PM - 3:30 PM
[17p-P3-21] Examination of narrow pitch pattern process at GaN double polarity selective area growth using MOVPE
Keywords:MOVPE, polarity, selective area growth
Poster presentation
15 Crystal Engineering » 15.4 III-V-group nitride crystals
Fri. Mar 17, 2017 1:30 PM - 3:30 PM P3 (BP)
1:30 PM - 3:30 PM
Keywords:MOVPE, polarity, selective area growth