Takayoshi Tsutsumi

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 6:45 PM 223 (223)

Symposium (Oral)
| Symposium
| Current status and future prospect of atomic layer processes

[20p-223-1~11] Current status and future prospect of atomic layer processes

6:00 PM - 6:15 PM

[20p-223-9] Fluorocarbon-Assisted Atomic Layer Etching for Si-Based Materials

〇Takayoshi Tsutsumi¹, Hiroki Kondo¹, Kenji Ishikawa¹, Makoto Sekine¹, Nobuyoshi Kobayashi², Masaru Hori³ (1.Nagoya Univ. Eng., 2.ASM Japan K.K., 3.Nagoya Univ. Inst. Innovation for Future Society)

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