Kazunori Iga

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-438-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:00 AM - 10:15 AM

△ [20a-438-5] Production process of ions in high power pulse sputtering discharge using titanium target

〇(M2)Kazunori Iga¹, Takayuki Ohta¹ (1.Meijo Univ.)