Satoru Yoshimura

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PA (Event Hall)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication (7.1～7.5) (Poster)

[20a-PA1-1~11] 7 Beam Technology and Nanofabrication (Poster)

9:30 AM - 11:30 AM

[20a-PA1-10] Low-Energy Silicon Molecular Ion Beam Produced from Hexamethyldisilazane

〇Satoru Yoshimura¹, Satoshi Sugimoto¹, Takae Takeuchi², Kensuke Murai³, Masato Kiuchi^3,1 (1.Osaka Univ., 2.Nara Women's Univ., 3.AIST)