Yoshihiro Koga

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:15 PM - 7:30 PM 222 (222)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[20p-222-1~23] 6.2 Carbon-based thin films

3:30 PM - 3:45 PM

[20p-222-10] A Study of Room-Temperature Bonding of SOI Wafer with Diamond-BOX Layer ２
- Evaluating electrical characteristics using test element group -

〇Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO CORPORATION)