Kohei Shima

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:30 PM - 6:30 PM 234A (234-1)

Oral presentation
| 21 Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20p-234A-1~18] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

3:15 PM - 3:30 PM

△ [20p-234A-7] Preparation of SiO₂/HfO₂ dielectric distributed Bragg reflectors using the reactive helicon-wave-excited-plasma sputtering method

〇Kohei Shima¹, Takumi Kasuya^1,2, Kazunobu Kojima^1,2, Shigefusa Chichibu^1,2 (1.IMRAM-Tohoku Univ., 2.Dept. Appl. Phys.-Tohoku Univ.)