15:15 〜 15:30 ▲ [20p-233-5] Helium ion microscopy (HIM) for imaging fine line features patterned organic film with less damage 〇Shinichi Ogawa1、Tomoya Ohashi2、Shigeki Oyama2、Yuki Usui2 (1.AIST、2.NISSAN CHEMICAL IND.)