Shinichi Ogawa

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:30 PM - 6:00 PM 233 (233)

Symposium (Oral)
| Symposium
| Advanced ion microscopy for future nanoelectronics materials and devices

[20p-233-1~10] Advanced ion microscopy for future nanoelectronics materials and devices

3:15 PM - 3:30 PM

▲ [20p-233-5] Helium ion microscopy (HIM) for imaging fine line features patterned organic film with less damage

〇Shinichi Ogawa¹, Tomoya Ohashi², Shigeki Oyama², Yuki Usui² (1.AIST, 2.NISSAN CHEMICAL IND.)