Itaru Yanagi

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 9:00 AM - 12:00 PM 222 (222)

Oral presentation
| 12 Organic Molecules and Bioelectronics
| 12.6 Nanobiotechnology

[18a-222-1~11] 12.6 Nanobiotechnology

9:30 AM - 9:45 AM

[18a-222-3] Two-step breakdown of a SiN membrane for nanopore fabrication: Formation of thin portion and penetration

〇Itaru Yanagi¹, Hirotaka Hamamura¹, Rena Akahori¹, Kenichi Takeda¹ (1.Hitachi, Ltd)