Eri Tahara

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 9:30 AM - 12:00 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[18a-233-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:45 AM - 10:00 AM

[18a-233-2] The Influence of SiC Film Surface Condition for Spherical Particle Formation on The Film by De-Ionized Water Washing

〇Eri Tahara¹, Tohru Fujita¹, Kengou Inoue¹, Masakatsu Tanaka¹, Rikiya Hoki¹, Naoki Idani¹, Toshifumi Mori¹ (1.Mie Fujitsu Semiconductor)