Moritsugu Sakamoto

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 1:45 PM - 6:00 PM 136 (3Ｆ_Lobby)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[18p-136-1~15] 3.7 Laser processing

4:00 PM - 4:15 PM

△ [18p-136-9] Fine metal line structure fabrication by photolithography using coaxial interference pattern of optical vortices

〇Moritsugu Sakamoto¹, Takuya Hizatsuki¹, Yuki Nakada¹, Kohei Noda¹, Tomoyuki Sasaki¹, Nobuhiro Kawatsuki², Kohei Goto³, Hiroshi Ono¹ (1.Nagaoka Univ. of Tech., 2.Univ. of Hyogo, 3.NISSAN CHEMICAL INDUSTRIES, LTD)

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