Hiroshi Fujioka

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 1:30 PM - 6:00 PM 146 (Reception Hall)

Symposium (Oral)
| Symposium
| New Process Technology of Nitride Semiconductors

[18p-146-1~8] New Process Technology of Nitride Semiconductors

2:30 PM - 3:00 PM

[18p-146-3] Development of sputtering epitaxial growth processes for AlGaN

〇Hiroshi Fujioka^1,2, Yuya Sakurai¹, Kohei Ueno¹, Atsushi Kobayashi¹ (1.The Univ. of Tokyo, 2.JST-ACCEL)