Hideto Miyake

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 1:30 PM - 6:00 PM 146 (Reception Hall)

Symposium (Oral)
| Symposium
| New Process Technology of Nitride Semiconductors

[18p-146-1~8] New Process Technology of Nitride Semiconductors

5:00 PM - 5:30 PM

[18p-146-7] High-temperature annealing of sputtered AlN film and fabrication of AlGaN deep-UV LED on the substrate

Nagamatsu Kentaro¹, Uesugi Kenjiro¹, Shojiki Kanako², Yoshida Harumasa¹, 〇Hideto Miyake^2,3 (1.OPRI, Mie Univ., 2.Eng., Mie Univ., 3.RIS, Mie Univ.)