4:00 PM - 6:00 PM [18p-PA6-2] Impact of Dosage on Electrical Properties of Mg-Ion-Implanted GaN before High-Temperature Annealing 〇(M1)Ryo Kamoshida1, Kei Uetake1, Masamichi Akazawa1 (1.RCIQE, Hokkaido Univ.)