Tatsuya Koga

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 1:30 PM - 3:30 PM PB (Shirotori Hall)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[18p-PB2-1~7] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

△ [18p-PB2-4] A Study on Thick Au Proof-Mass for High-Performance MEMS Accelerometer

〇Tatsuya Koga¹, Daisuke Yamane¹, Toshifumi Konishi², Teruaki Safu², Shinichi Iida², Hiroyuki Ito¹, Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹ (1.Tokyo Tech, 2.NTT-AT)

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