Kohei Nakae

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 9:00 AM - 12:00 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-233-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:30 AM - 11:45 AM

[19a-233-10] Polarity Change of Ge-on-Insulator Fabricated by using Smart-Cut Technique

〇Kohei Nakae¹, Feida Xue¹, Keisuke Yamamoto¹, Dong Wang¹, Hiroshi Nakashima², Miao Zhang³, Zhongying Xue³, Zengfeng Di³ (1.I-EGGS, Kyushu Univ., 2.GIC, Kyushu Univ., 3.SIMIT, Chinese Academy of Sciences)

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