Kazuki Senga

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 9:00 AM - 12:00 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-233-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:45 AM - 10:00 AM

[19a-233-3] Formation of Epitaxial HfGe₂/Ge contact and its crystalline and electrical properties

〇Kazuki Senga¹, Osamu Nakatsuka^1,2, Akihiro Suzuki^1,3, Mitsuo Sakashita¹, Shigeaki Zaima^1,4 (1.Grad. Sch. of Eng., Nagoya Univ., 2.Reserch Fellow of JSPS, 3.IMaSS, Nagoya Univ., 4.IIFS, Nagoya. Univ.)