Masaki Yamamoto

→ Search for Masaki Yamamoto in Google Scholar

Speaker, Author, Co-Author

Wed. Sep 19, 2018 9:00 AM - 12:00 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-233-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:30 AM - 10:45 AM

[19a-233-6] Process Dependence of SiC Nano-Dots Size in Bulk-Si Substrate

〇Masaki Yamamoto¹, Takashi Aoki¹, Sameshima Toshiyuki², Tomohisa Mizuno¹ (1.Kanagawa Univ., 2.Tokyo Univ Agri. Tech.)