Kozo Sugimoto

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 9:30 AM - 11:30 AM PA (Event Hall)

Poster presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[19a-PA4-1~13] 3.7 Laser processing

9:30 AM - 11:30 AM

[19a-PA4-1] Fabricating diffraction grating inside silicon wafer by short pulse laser

〇(M2)Kozo Sugimoto¹, Shigeki Matsuo¹ (1.Shibaura Inst. of Tech.)