Toshifumi Kikuchi

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 9:30 AM - 11:30 AM PA (Event Hall)

Poster presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[19a-PA4-1~13] 3.7 Laser processing

9:30 AM - 11:30 AM

[19a-PA4-10] Development of a laser doping system for SiC power device fabrication

〇Toshifumi Kikuchi^1,2, Kaname Imokawa^1,2, Akihiro Ikeda³, Daisuke Nakamura¹, Tanemasa Asano¹, Hiroshi Ikenoue^1,2 (1.Grad. Sch. ISEE. Kyushu Univ., 2.NEXT GLP, Kyushu Univ., 3.Sojo Univ.)

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