Rie Ozaki

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 1:30 PM - 5:45 PM 131 (131+132)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[19p-131-1~15] 15.7 Crystal characterization, impurities and crystal defects

3:30 PM - 3:45 PM

[19p-131-8] Segregation Gettering Mechanism in Heavily P-doped Silicon Wafers

〇Rie Ozaki¹, Kazuhisa Torigoe¹, Taisuke Mizuno¹, Kazuhiro Yamamoto¹ (1.SUMCO)