Satoko Nakagawa

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 1:30 PM - 5:45 PM 131 (131+132)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[19p-131-1~15] 15.7 Crystal characterization, impurities and crystal defects

3:45 PM - 4:00 PM

[19p-131-9] Cathodoluminescence evaluation of boron ion implantation damage in silicon wafers

〇Satoko Nakagawa¹, Toshiro Minami¹, Takashi Ishikawa¹, Shin-ichi Nishizawa² (1.GlobalWafers Japan, 2.Kyushu Univ.)