Reijiro Shimura

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 1:45 PM - 7:00 PM 133 (133+134)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[19p-133-1~19] 6.1 Ferroelectric thin films

6:30 PM - 6:45 PM

[19p-133-18] Preparation of HfO₂-based ferroelectric thick film by sputtering method and their electrical property

〇Reijiro Shimura¹, Takanori Mimura¹, Takao Shimizu¹, Hiroshi Funakubo¹ (1.Tokyo Tech. SMCT)