Takeshi Ohmori

→ Search for Takeshi Ohmori in Google Scholar

Speaker, Author, Co-Author

Wed. Sep 19, 2018 1:30 PM - 5:15 PM 141 (141+142)

Symposium (Oral)
| Symposium
| Plasma Informatics - Development of Plasma Science by Taking Advantage of Big Data and Analytics

[19p-141-1~8] Plasma Informatics - Development of Plasma Science by Taking Advantage of Big Data and Analytics

4:00 PM - 4:30 PM

[19p-141-6] Optimization of Plasma Etching Profile Utilizing Machine Learning

〇Takeshi Ohmori¹, Hyakka Nakada¹, Masayoshi Ishikawa¹, Naoyuki Kofuji¹, Tatehito Usui¹, Masaru Kurihara¹ (1.Hitachi, Ltd., R&D Group)