Masahito Kurouchi

→ Search for Masahito Kurouchi in Google Scholar

Speaker, Author, Co-Author

Wed. Sep 19, 2018 1:30 PM - 4:15 PM 234A (234-1)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[19p-234A-1~10] 7.3 Micro/Nano patterning and fabrication

2:30 PM - 2:45 PM

[19p-234A-5] Estimation of Resist Bottom Widths for Reverse-tapered Resist Patterns using Top-view SEM Observation with High Acceleration Voltage

〇Masahito Kurouchi¹, Manabu Yasui¹, Satoru Kaneko¹ (1.KISTEC)