Hideki Sakurai

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 3:00 PM - 6:45 PM CE (Century Hall)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[19p-CE-5~17] 13.7 Compound and power electron devices and process technology

5:15 PM - 5:30 PM

[19p-CE-12] Mg/N co-implantation and ultra-high pressure N₂ thermal activation process for p-doping into GaN

〇Hideki Sakurai^1,2,3, Shinji Yamada^1,2,3, Masato Omori¹, Yukihiro Furukawa³, Hideo Suzuki³, Michal Bockowski^1,4, Jun Suda^1,2, Tetsu Kachi¹ (1.Nagoya Univ. IMaSS, 2.Nagoya Univ., 3.ULVAC ISET, 4.UNIPRESS)